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Electron-beam lithography
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#	Item
61	Microsoft PowerPoint - Electron-Beam and X-Ray Lithography.ppt Add to Reading List Source URL: www.ece.umd.edu Language: English - Date: 2007-12-07 18:05:09 Microtechnology Photolithography X-ray lithography Electron beam lithography Lithography Resist Photoresist Next-generation lithography Nanolithography Materials science Technology Semiconductor device fabrication
62	Milestones in Optical Lithography Tool Suppliers [Compatibility Mode] Add to Reading List Source URL: www.lithoguru.com Language: English - Date: 2012-04-29 13:06:04 Stepper Photolithography Computervision SEMATECH Wafer Electron beam lithography Philips Applied Materials Ricochet Technology Materials science Microtechnology
63	ARTICLE Received 5 Dec 2012 \| Accepted 28 May 2013 \| Published 19 Jun 2013 Add to Reading List Source URL: www.nature.com Language: English - Date: 2013-06-19 12:45:22 Photonics Nonlinear optics Electron beam lithography Two-photon absorption STED microscopy Laser Photolithography Nanolithography Angular resolution Physics Optics Materials science
64	PDF Document Add to Reading List Source URL: www.benthamscience.com Language: English - Date: 2011-05-18 08:09:28 Semiconductor device fabrication Heat-assisted magnetic recording Computer storage media Nanolithography Extreme ultraviolet lithography Resist Electron beam lithography Interference lithography Photolithography Materials science Microtechnology Technology
65	PDF Document Add to Reading List Source URL: cm.bell-labs.com Language: English - Date: 1999-12-16 12:41:13 Photolithography Electron beam lithography Resist Next-generation lithography Resolution enhancement technologies Lithography Proximity effect Computational lithography Materials science Technology Microtechnology
66	PDF Document Add to Reading List Source URL: muri.lci.kent.edu Language: English - Date: 2009-05-05 11:33:36 Optical devices Diffraction Diffraction grating Photonics Superlens Photoresist Electron beam lithography Grating Photolithography Physics Optics Materials science